Product Series

Molybdenum Sputtering Targets

Product Introduction


Molybdenum has a high melting point, good electrical conductivity, low specific impedance, excellent corrosion resistance and environmental performance, allowing the material to form molybdenum coating on various substrates by means of a magnetron sputtering process layer. This molybdenum coating is widely used in electronic components and products, and the targets comply with the strictest quality standards. Our targets exhibit the following characteristics:

Ultra-high purity

Higher purity of the target leads to a lower probability of abnormal particles during PVD and a better performance of the sputtered film. Impurities in the material are major pollution sources of film deposition, which must be strictly controlled. Our pure molybdenum targets have a molybdenum content of no less than 99.97%, fully ensuring the quality of the sputtered film so that every pixel functions perfectly.

Ultra-high density

High-density targets provide a higher sputtering yield, which can increase the sputtering area in unit time. By means of large rolling deformation, we achieve almost 100% density in our molybdenum targets, with values up to 10.2 g/cm3. This significantly avoids particle splashing caused by the sudden release of pores in the solid, thereby improving film quality.

Fine, uniform grain size

For the same target material, targets with smaller grains have a faster sputtering rate, while sputtering targets with uniform grain distribution deposit a more uniform film thickness. The targets we produce through special processes are characterized by their fine, uniform grain sizes.

Wide selection of target types

We can provide many types of molybdenum sputtering targets, which are divided into molybdenum square targets, molybdenum strip targets and molybdenum tube targets according to their shape. According to the material classification, targets can be divided into pure molybdenum targets and molybdenum alloy targets.

Sputtering targets that have Nb, Ni, Ti and other alloying elements combined with molybdenum offer better corrosion resistance and film adhesion than those coated with pure molybdenum targets. This improves the service life, reliability and user experience of electronic products for flat panel displays. As flat-panel displays are becoming more and more popular, and since users have higher requirements for these products, molybdenum alloy targets are gradually replacing traditional pure molybdenum targets. Their application is also increasing, with the demand for high-purity, high-density, and large-size molybdenum alloy targets becoming ever more pronounced. Through many years of research and development, ATTL has independently developed molybdenum alloy targets that meet the needs of high-end users. The company has obtained a number of national invention patents with proprietary intellectual property rights.

 

 

Product Application


The application of molybdenum sputtering targets is mainly concentrated in flat panel displays, CIGS solar cell electrodes and wiring materials, and in semiconductor barrier materials. The high melting point, high conductivity, low specific impedance, excellent corrosion resistance and environmental performance of molybdenum materials greatly improve the brightness, contrast, color, and lifespan of displays.

 

Product Specifications


Molybdenum sputtering target products are divided according to the size of the glass substrate, while board target products can be divided into squares and strips. Restricted by the level of preparation, target products of the G6 generation and below are mostly square shaped, while products above G6 are mostly strip or tube shapes, which are used after the splicing process.

ATTL provides target materials of all generations (G3-G10.5). The advanced ultra-large rolling mill for refractory metals - 2100mm single-stand four-roller reversible hot rolling mill, can produce the largest G6 square targets, G10.5 long targets and G8.6 rotating targets currently required by the flat panel display market.

Main generation panel sizes and required molybdenum target specifications

Generation

Glass size/mm

Cut size/inch

Quantity/piece

Target size/mm

Target type

G3

550*650

15

4

950*860*16

Molybdenum square target

G4

680*880

15

6

980*1150*10

Molybdenum square target

G5

1100*1300

27

6

1700*1431*12

Molybdenum square target

G5.5

1300*1500

27

8

1950*1580*14

Molybdenum square target

G6

1500*1850

32

8

2300*1800*14

Molybdenum square target

37

6

2300*195*16

Molybdenum square target

G8.5

2200*2500

55

6

2650*210*18

Molybdenum square target

G8.6

2250*2600

58

6

OD167.2*ID135.1*2692

Molybdenum square target

G10.5

2940*3370

65

8

3430*200*18

Molybdenum square target

Fabrication Process


Company Advantage


R&D and production capacity of targets on all generation lines.

Sufficient capacity and stocks to secure your production demands.

Large-size nondestructive testing equipment with an effective stroke of 4000 * 2000 mm. to ensure that the product has no defects, and to achieve the required perfect coating effect.

Strict and stable quality control ensures that the factory products have an extremely high purity of more than 99.97%, a grain size of less than 100μm, and a high density of over 10.2g/cm³ (> 99%).

Contact Information

Ji Pengfei


+86-10-58717301


jipengfei@atmcn.com


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