Product Series

Heat Shield for MOCVD Heaters

Product Introduction


Tungsten and molybdenum are characterized by high melting points, excellent high temperature performance, low resistivity, and small thermal expansion coefficients. After rolling, the plate will be close to the theoretical density, and the surface will be close to a mirror state after proper treatment. It displays excellent heat reflection performance and high temperature creep resistance, with very little volatilization.

 

Product Application


MOCVD equipment has extremely high requirements in terms of temperature uniformity and stability. The multi-layer shielding function of the tungsten-molybdenum heat shield provides a uniform reaction heat field for the MOCVD equipment.

 

Product Specifications


Spare parts for various types of MOCVD devices are available to choose from, and can also be customized according to your specific temperature field design.

Fabrication Process


Company Advantage


60-year experience in refractory metal manufacturing.

Complete quality inspection and measurement methods.

Precision process control.

Supports semiconductor clean room requirements.

Contact Information

Ji Pengfei


+86-10-58717301


jipengfei@atmcn.com


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